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1

Platinum and palladium oxalates: positive-tone extreme ultraviolet resists

Sortland, Miriam, Hotalen, Jodi, Re, Ryan Del, Passarelli, James, Murphy, Michael, Kulmala, Tero S., Ekinci, Yasin, Neisser, Mark, Freedman, Daniel A., Brainard, Robert L.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2015

Language:

english

File:

PDF, 3.13 MB

english, 2015

2

Inkjet-Printed Graphene Electronics

Torrisi, Felice, Hasan, Tawfique, Wu, Weiping, Sun, Zhipei, Lombardo, Antonio, Kulmala, Tero S., Hsieh, Gen-Wen, Jung, Sungjune, Bonaccorso, Francesco, Paul, Philip J.

Journal:

Year:

2012

Language:

english

File:

PDF, 3.13 MB

english, 2012

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - Toward 10nm half-pitch in EUV lithography: results on resist screening and pattern collapse mitigation techniques

Wood, Obert R., Panning, Eric M., Kulmala, Tero S., Vockenhuber, Michaela, Buitrago, Elizabeth, Fallica, Roberto, Ekinci, Yasin

Year:

2015

Language:

english

File:

PDF, 984 KB

english, 2015

4

Toward 10 nm half-pitch in extreme ultraviolet lithography: results on resist screening and pattern collapse mitigation techniques

Kulmala, Tero S., Vockenhuber, Michaela, Buitrago, Elizabeth, Fallica, Roberto, Ekinci, Yasin

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2015

Language:

english

File:

PDF, 2.41 MB

english, 2015

5

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Extreme Ultraviolet (EUV) Lithography VII - A bottom-up pattern collapse mitigation strategy for EUV lithography

Panning, Eric M., Goldberg, Kenneth A., Kulmala, Tero S., Vockenhuber, Michaela, Ekinci, Yasin

Year:

2016

Language:

english

File:

PDF, 705 KB

english, 2016

6

Novel carbon nanotube network deposition technique for electronic device fabrication

Marina Y. Zavodchikova, Albert G. Nasibulin, Tero Kulmala, Kestutis Grigoras, Anton S. Anisimov, Sami Franssila, Vladimir Ermolov, Esko I. Kauppinen

Journal:

physica status solidi (b)

Year:

2008

Language:

english

File:

PDF, 396 KB

english, 2008

7

Carbon nanotube thin film transistors based on aerosol methods

Zavodchikova, Marina Y, Kulmala, Tero, Nasibulin, Albert G, Ermolov, Vladimir, Franssila, Sami, Grigoras, Kestutis, Kauppinen, Esko I

Journal:

Year:

2009

Language:

english

File:

PDF, 1.49 MB

english, 2009

8

Self-Aligned Coupled Nanowire Transistor

Kulmala, Tero S., Colli, Alan, Fasoli, Andrea, Lombardo, Antonio, Haque, Samiul, Ferrari, Andrea C.

Journal:

Year:

2011

Language:

english

File:

PDF, 4.19 MB

english, 2011

9

Heavy Duty Diesel Engine Exhaust Aerosol Particle and Ion Measurements

Lähde, Tero, Rönkkö, Topi, Virtanen, Annele, Schuck, Tanja J., Pirjola, Liisa, Hämeri, Kaarle, Kulmala, Markku, Arnold, Frank, Rothe, Dieter, Keskinen, Jorma

Journal:

Environmental Science & Technology

Year:

2009

Language:

english

File:

PDF, 714 KB

english, 2009

10

[OSA CLEO: Science and Innovations - San Jose, California (2013..-..)] CLEO: 2013 - Wavelength Tunable Graphene Modelocked VECSEL

Zaugg, Christian A., Sun, Zhipei, Popa, Daniel, Milana, Silvia, Kulmala, Tero, Sundaram, Ravi S., Wittwer, Valentin J., Mangold, Mario, Sieber, Oliver D., Golling, Matthias, Lee, Y., Ahn, Jong-Hyun, F

Year:

2013

File:

PDF, 232 KB

2013

11

[OSA CLEO: Science and Innovations - San Jose, California (2013..-..)] CLEO: 2013 - Wavelength Tunable Graphene Modelocked VECSEL

Zaugg, Christian A., Sun, Zhipei, Popa, Daniel, Milana, Silvia, Kulmala, Tero, Sundaram, Ravi S., Wittwer, Valentin J., Mangold, Mario, Sieber, Oliver D., Golling, Matthias, Lee, Y., Ahn, Jong-Hyun, F

Year:

2013

Language:

english

File:

PDF, 232 KB

english, 2013

12

Pattern collapse mitigation in inorganic resists via a polymer freeze technique

Kulmala, Tero S., Buitrago, Elizabeth, Vockenhuber, Michaela, Ekinci, Yasin

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 996 KB

english, 2016

13

SnOx high-efficiency EUV interference lithography gratings towards the ultimate resolution in photolithography

Buitrago, Elizabeth, Fallica, Roberto, Fan, Daniel, Kulmala, Tero S., Vockenhuber, Michaela, Ekinci, Yasin

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 2.04 MB

english, 2016